What common measurement technique is used in a typical MEMS accelerometer to quantify the deflection of the proof mass?
Answer
Capacitive sensing
The movement of the proof mass relative to fixed electrodes creates a measurable change in capacitance, which is the standard method for reading the deflection in many MEMS accelerometers.
Related Questions
When did the first truly successful commercial MEMS accelerometers primarily arrive on the market?What critical need primarily drove the early commercial adoption of MEMS accelerometers?Which specific company is widely credited with launching the first successful commercial MEMS accelerometer?What set of manufacturing advancements provided the essential toolkit for fabricating MEMS devices?Compared to traditional sensors, MEMS heavily relies on which type of manufacturing technique derived from IC fabrication?Around what decade were researchers first demonstrating basic micro-machined structures like early silicon pressure sensors?What common measurement technique is used in a typical MEMS accelerometer to quantify the deflection of the proof mass?When did the field of MEMS, combining mechanical and electrical engineering at the micron scale, start gaining significant momentum as a recognized discipline?What was a significant drawback of traditional accelerometers compared to later MEMS versions?Beyond the physical structure, what factor is often cited as the true 'invention' that made MEMS accelerometers ubiquitous?