Beyond the physical structure, what factor is often cited as the true 'invention' that made MEMS accelerometers ubiquitous?

Answer

The validated, scalable manufacturing process

The ability to fabricate millions of identical, low-cost sensors simultaneously using existing semiconductor lines provided the necessary economic foundation for widespread adoption.

Beyond the physical structure, what factor is often cited as the true 'invention' that made MEMS accelerometers ubiquitous?
inventionsensordeviceaccelerometerMEMS