Compared to traditional sensors, MEMS heavily relies on which type of manufacturing technique derived from IC fabrication?

Answer

Additive and patterning techniques

MEMS production favors additive and patterning techniques borrowed from semiconductor fabrication, contrasting sharply with the subtractive machining often used for older, larger mechanical parts.

Compared to traditional sensors, MEMS heavily relies on which type of manufacturing technique derived from IC fabrication?
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